Franklin L. Duan's research while affiliated with Shanghai Jiao Tong University and other places
Publications (39)
View
Video Presentation: https://doi.org/10.2514/6.2021-3224.vid Thin film
thermocouple (TFTC) is a smart sensor to measure the surface temperature
of aero-engine high temperature components. The conventional
fabrication of TFTC using MEMS processing is unsuitable to build the
sensors on the surface with complex topology and for big on-site
compone...
View
Video Presentation: https://doi.org/10.2514/6.2021-3159.vid The modern
intelligent aero-engines needs smart embeded sensors on the surface of
the hot parts such as turbine blade. These thin-film sensors ought to be
manufactured on the surface of insulating substrates, but most of the
aero-engine components are made of metals. Therefore, to bui...
View
Video Presentation: https://doi.org/10.2514/6.2021-3162.vid Thin-film
thermocouple (TFTC) to measure the high temperature on the surface of
turbine blades plays an indispensable role to build smart sensors for
intelligent aero-engines. Due to the thermal stress mismatch between the
multiple layers, the thin film may exhibit the peeling-off phe...
View
Video Presentation: https://doi.org/10.2514/6.2021-3140.vid Application
of Thin Film Thermocouples on Nozzle Guide Vane’s Cooling Performance
Tests Cooling performance eveluation plays an important role in nozzle
guide vane (NGV) optimization design and reliability evaluation.
Accurate temperature measurements on the designated key positions o...
Thin
film thermocouple (TFTC) is a smart sensor to measure the surface
temperature of aero-engine high temperature components. The conventional
fabrication of TFTC using MEMS processing is unsuitable to build the
sensors on the surface with complex topology and for big on-site
component. In this report, a new methodology to build TFTC is proposed
a...
Pt/PtRh
thin film thermocouple (TFTC) sensor was built on the CMC surface by
MEMS micro-fabrication technology and its high temperature
characteristics were analyzed by high temperature cycling test. This
TFTC sensor is capable to measure up to 1500 ℃ high temperature with a
good repeatability with the measurement error less than ±0.2% (< ±2
℃). Te...
Elevating
the intelligent level of the aero-/astro-systems requires smart sensors
to get the inner massage and monitor the internal state. For example
the accurate measurements of surface temperature of the critical
component like the nozzle guide vane plays an indispensable role to
optimize the dynamic balance between the high temperature and the...
High-
temperature wireless passive Wi-Fi sensor plays an important role to
monitor the working status of the hot aero-engine parts such as rotating
turbines in the propulsion system. Surface acoustic wave (SAW) device
is a good candidate to achieve this wireless sensing in this
high-temperature test where the wired sensors are not applicable.
There...
Pt/PtRh
thermocouple sensor was built on the CMC surface by MEMS
micro-fabrication technology and its high temperature characteristics
was analyzed by high temperature cycling measurements. Such thin film
sensor is capable to measure up to 1500 ℃ high temperature on the CMC
surface, a good indication to embed high-temperature sensor on the blade
su...
High
temperature wireless passive sensor is very important for the
measurement and monitoring of high temperature of the hot aero-engine
parts such as rotating turbines in the propulsion system. Surface
acoustic wave (SAW) device is a good candidate to achieve this wireless
sensing capability in this high-temperature test scenarios where the
wired...
Thin
film thermocouples (TFTC) embedded on the turbine blade is of great
importance to measure the surface temperature distribution. Traditional
technology to form the TFTC usually involves a soft-photolithographic
technique which makes it hard to make the thin film pattern on the sharp
curvature such as the front-edge surface on nozzle guide vane...
Smart
sensors are needed to achieve a more intelligent aero-engine. The
thin-film sensor array is thereby fabricated on the turbine blade
surface using MEMS technology to measure the surface temperature
distribution for the first time. A series of PtRh/Pt thin film
thermocouple (TFTC) is directly integrated in-situ on blade surface by
dry film phot...
High
temperature measurement of the rotating parts in aero-engine system
requires wireless passive sensors. Surface acoustic wave (SAW) devices
capable of measuring high temperature wirelessly are therefore ideal for
these extreme scenarios where wired sensors are not applicable. In this
article, SAW sensors built on the LiNbO
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Solidly
mounted resonators (SMRs) rely on high-quality Bragg reflectors, for
which tungsten has been used as the high acoustic impedance layer. It is
unclear about the effects of tungsten phases on the acoustic
performance of SMRs. In this study, high-quality flat layers of
different phase structures of W (α-W and β-W) are obtained by changing
the...
High
performance turbine blade for advanced aero-engines needs a low
thermal-conductive layer to buffer surface heat from the base metal.
Since air possesses lowest thermal conductivity, adding the air
ingredient into the solid material or increasing the porosity will
accordingly improve the thermal buffering effect of this layer. In this
paper, th...
Integrated
thin-film sensors to measure the vane’s surface temperature are
necessary for more efficient and smarter aeroengines. In this paper, a
thin-film platinum/rhodioplatinum sensor array was built using
microelectromechanical system technology on the surface of a nozzle
guide vane, and a series of harsh tests was formulated and performed on
t...
Intelligent
aeroengine requires high temperature sensors, especially MEMS thin film
sensors directly fabricated on the surface of turbine blade. For this
purpose, an electrical insulation layer is needed on blade substrate
metals. However, the electrical insulation of ceramic materials will
degrade at high temperatures, thereby affecting the charac...
The
surface acoustic wave (SAW) device can be used to measure temperature
wirelessly, which is highly adaptable to the use in aero-engines
high-temperature test scenarios where wired-sensors is not suitable for
its difficulty in signal transfers. Herein, this paper presents a SAW
sensor capable of achieving high-temperature measurement up to 800 °C...
Thin
film bulk acoustic resonator (FBAR) plays a very important role in
radio frequency (RF) filters used in cell phone and other wireless
systems. Although FBAR is commercialized, the design/process
interactions on the frequency response variation in FBAR device are
still lacking. Design and fabrication are two crucial aspects affecting
FBAR devic...
In
this paper, surface acoustic wave (SAW) devices with various designs
were fabricated on two types of piezoelectric substrates of LiNbO3 bulk
material and thin piezoelectric ZnO film on silicon. Different sizes,
orientation and types of SAW devices were laid out on the same mask to
compare their RF performance with a same fabrication. Devices wer...
In
this report, an AlN-buffered ZnO double-layer piezoelectric layer based
SMR (solidly mounted resonator) was designed and fabricated, in which
the nano AlN film acted as a buffer layer. For optimization of the
piezoelectric layer, a series of SMRs were fabricated with different AlN
layer thicknesses from 15 nm to 100 nm by radio-frequency magnetr...
Fabricating
sensor devices directly on metallic component requires the use of an
electrical insulating ceramic layer between the sensor and the metal.
However, most ceramics lose their electrical insulation with the
increasing temperature. In this paper, electrical insulation properties
of ceramic thin film were extensively analyzed in high tempera...
The
platinum–platinum rhodium thin film thermocouples (TFTCs) were
fabricated on the alumina substrate by the micromachining technology,
which could operate at the temperature up to 1300°C. The thermoelectric
output voltage was measured in the temperature range of 50–1300°C. The
maximum thermoelectric voltage of the TFTC was 14.8 mV at 1300°C,
whic...
Citations
...
Thin film thermocouples (TFTC) on the other hand can be directly
fabricated on to the surface of a turbine blade or NGV, greatly
improving long term durability in comparison to conventional
thermocouples. COMSOL simulations carried out by Duan et al. [38]
show a ∼170 • C difference between conventional thermocouples and their
thinfilm counterparts due to the distance between the thermocouple
joint and the blade surface. The placement of a conventional
thermocouple in its insulation filling adds an additional uncertainty of
around 500 × 500 µm, which has a temperature difference from top to
bottom of ∼300 • C. The uncertainty associated with the use of
conventional thermocouples shows the motivation for the development of
thin film equivalents. ...
...
As one of the key components of airplanes and automotives, engines
contain numerous rotating parts, including blades, bearing brackets, and
shafts, which work in harsh environments, such as high rotational
speeds and high temperatures [1][2][3][4][5].
Therefore, monitoring rotational speed and temperature parameters is
vital for the safe and reliable operation of an engine. ...
... Zinc oxide is a wide-bandgap compound semiconductor material with excellent photoelectric properties [1][2][3]. As a new type of wide-bandgap semiconductor, ZnO has attracted increasing attention in recent years [4][5][6]. ...
... Duan et al. [74]
have found that the electrically conductive nature of TBCs at elevated
temperatures (above 600 • C) can be utilised as a form of smart sensor,
by measuring a change in resistance with temperature. Experimental data
shows good repeatability up to 950 • C, measurement error of less than
3%, fast response time (∼1s), and stability comparable to conventional
thermocouples and TFTCs. ...
...
The target-substrate spacing was about 70 mm. This high vacuum chamber
and related Mg x Zn 1−x O film recipes were optimized in another our
research article [24]. The vacuum chamber was pumped down to a base pressure of 3 × 10 -4 Pa for film deposition. ...
...
A thermocouple can be embedded into the TBC on the surface of an NGV in
this way and has been shown to perform well up to 450 • C [42]. The
addition of Al 2 O 3 to YSZ(yttria-stabilized zirconia)-based TBCs
improves their electrical insulation above 400 • C which allows TFTCs to
be used effectively [43].
A summary of THTC systems is given by Satish et al. [44] along with the
implementation of a K-type TFTC on an NGV deposited using an E-beam
evaporation technique. ...
...
With the advancements in artificial intelligence, development of
intelligent propulsion systems is a widely studied research area. Duan
et al. [10]
proposed a smart and economical method for measuring the temperature of
an aero-engine component using the thermal resistance on the turbine
blade surfaces which has thermal barrier coating made up of YSZ
material. It is used as a thermal sensor for intelligent monitoring the
surface temperature. ...
...
A summary of THTC systems is given by Satish et al. [44] along with the
implementation of a K-type TFTC on an NGV deposited using an E-beam
evaporation technique. Two methods of measuring temperature distribution
on a TBC coating are given by Z. Ji et al. [45] whereby Pt soldering dots are placed along a PtRH thin film. Measurements are possible up to 1200 • C with this method. ...
...
Recent years, thin film and bulk semiconductor thermocouples are widely
investigated and applied in many advanced fields because of lack of
vibration, energy efficiency, temperature range that has wide
applications and high sensitivity value. 107,187,[190][191][192][193][194][195][196][197]
So far, the cooling devices TE 107,198 have been examined and used in
systems microclimate cooling that have been developed for military
missions, medical devices, refrigerators powered by solar cells,
interior air coolers and temperature controllers for microelectronic
devices. 107 ...
...
They are able to convert electrical energy into mechanical waves on the
basis of the inverse piezoelectric effect. Basically, SAW devices are
realized using an interdigital transducer (IDT) on a piezoelectric
crystal substrate, such as quartz or lithium niobate (LiNbO 3 ) [2].
When excited by an AC voltage coming from an external voltage source or
RF signal, the IDT provides, as a consequence of the inverse
piezoelectric effect, the electric field necessary to displace the
substrate and thus to form an acoustic wave on the piezoelectric crystal
substrate. ...