Franklin L. Duan's research while affiliated with Shanghai Jiao Tong University and other places

Publications (39)

Conference Paper
View Video Presentation: https://doi.org/10.2514/6.2021-3224.vid Thin film thermocouple (TFTC) is a smart sensor to measure the surface temperature of aero-engine high temperature components. The conventional fabrication of TFTC using MEMS processing is unsuitable to build the sensors on the surface with complex topology and for big on-site compone...
Conference Paper
View Video Presentation: https://doi.org/10.2514/6.2021-3159.vid The modern intelligent aero-engines needs smart embeded sensors on the surface of the hot parts such as turbine blade. These thin-film sensors ought to be manufactured on the surface of insulating substrates, but most of the aero-engine components are made of metals. Therefore, to bui...
Conference Paper
View Video Presentation: https://doi.org/10.2514/6.2021-3162.vid Thin-film thermocouple (TFTC) to measure the high temperature on the surface of turbine blades plays an indispensable role to build smart sensors for intelligent aero-engines. Due to the thermal stress mismatch between the multiple layers, the thin film may exhibit the peeling-off phe...
Conference Paper
View Video Presentation: https://doi.org/10.2514/6.2021-3140.vid Application of Thin Film Thermocouples on Nozzle Guide Vane’s Cooling Performance Tests Cooling performance eveluation plays an important role in nozzle guide vane (NGV) optimization design and reliability evaluation. Accurate temperature measurements on the designated key positions o...
Conference Paper
Thin film thermocouple (TFTC) is a smart sensor to measure the surface temperature of aero-engine high temperature components. The conventional fabrication of TFTC using MEMS processing is unsuitable to build the sensors on the surface with complex topology and for big on-site component. In this report, a new methodology to build TFTC is proposed a...
Conference Paper
Pt/PtRh thin film thermocouple (TFTC) sensor was built on the CMC surface by MEMS micro-fabrication technology and its high temperature characteristics were analyzed by high temperature cycling test. This TFTC sensor is capable to measure up to 1500 ℃ high temperature with a good repeatability with the measurement error less than ±0.2% (< ±2 ℃). Te...
Conference Paper
Elevating the intelligent level of the aero-/astro-systems requires smart sensors to get the inner massage and monitor the internal state. For example the accurate measurements of surface temperature of the critical component like the nozzle guide vane plays an indispensable role to optimize the dynamic balance between the high temperature and the...
Conference Paper
High- temperature wireless passive Wi-Fi sensor plays an important role to monitor the working status of the hot aero-engine parts such as rotating turbines in the propulsion system. Surface acoustic wave (SAW) device is a good candidate to achieve this wireless sensing in this high-temperature test where the wired sensors are not applicable. There...
Conference Paper
Pt/PtRh thermocouple sensor was built on the CMC surface by MEMS micro-fabrication technology and its high temperature characteristics was analyzed by high temperature cycling measurements. Such thin film sensor is capable to measure up to 1500 ℃ high temperature on the CMC surface, a good indication to embed high-temperature sensor on the blade su...
Conference Paper
High temperature wireless passive sensor is very important for the measurement and monitoring of high temperature of the hot aero-engine parts such as rotating turbines in the propulsion system. Surface acoustic wave (SAW) device is a good candidate to achieve this wireless sensing capability in this high-temperature test scenarios where the wired...
Conference Paper
Thin film thermocouples (TFTC) embedded on the turbine blade is of great importance to measure the surface temperature distribution. Traditional technology to form the TFTC usually involves a soft-photolithographic technique which makes it hard to make the thin film pattern on the sharp curvature such as the front-edge surface on nozzle guide vane...
Article
Smart sensors are needed to achieve a more intelligent aero-engine. The thin-film sensor array is thereby fabricated on the turbine blade surface using MEMS technology to measure the surface temperature distribution for the first time. A series of PtRh/Pt thin film thermocouple (TFTC) is directly integrated in-situ on blade surface by dry film phot...
Article
High temperature measurement of the rotating parts in aero-engine system requires wireless passive sensors. Surface acoustic wave (SAW) devices capable of measuring high temperature wirelessly are therefore ideal for these extreme scenarios where wired sensors are not applicable. In this article, SAW sensors built on the LiNbO <sub xmlns:mml="http:...
Article
Solidly mounted resonators (SMRs) rely on high-quality Bragg reflectors, for which tungsten has been used as the high acoustic impedance layer. It is unclear about the effects of tungsten phases on the acoustic performance of SMRs. In this study, high-quality flat layers of different phase structures of W (α-W and β-W) are obtained by changing the...
Article
Full-text available
High performance turbine blade for advanced aero-engines needs a low thermal-conductive layer to buffer surface heat from the base metal. Since air possesses lowest thermal conductivity, adding the air ingredient into the solid material or increasing the porosity will accordingly improve the thermal buffering effect of this layer. In this paper, th...
Article
Integrated thin-film sensors to measure the vane’s surface temperature are necessary for more efficient and smarter aeroengines. In this paper, a thin-film platinum/rhodioplatinum sensor array was built using microelectromechanical system technology on the surface of a nozzle guide vane, and a series of harsh tests was formulated and performed on t...
Article
Intelligent aeroengine requires high temperature sensors, especially MEMS thin film sensors directly fabricated on the surface of turbine blade. For this purpose, an electrical insulation layer is needed on blade substrate metals. However, the electrical insulation of ceramic materials will degrade at high temperatures, thereby affecting the charac...
Article
The surface acoustic wave (SAW) device can be used to measure temperature wirelessly, which is highly adaptable to the use in aero-engines high-temperature test scenarios where wired-sensors is not suitable for its difficulty in signal transfers. Herein, this paper presents a SAW sensor capable of achieving high-temperature measurement up to 800 °C...
Article
Thin film bulk acoustic resonator (FBAR) plays a very important role in radio frequency (RF) filters used in cell phone and other wireless systems. Although FBAR is commercialized, the design/process interactions on the frequency response variation in FBAR device are still lacking. Design and fabrication are two crucial aspects affecting FBAR devic...
Article
In this paper, surface acoustic wave (SAW) devices with various designs were fabricated on two types of piezoelectric substrates of LiNbO3 bulk material and thin piezoelectric ZnO film on silicon. Different sizes, orientation and types of SAW devices were laid out on the same mask to compare their RF performance with a same fabrication. Devices wer...
Article
In this report, an AlN-buffered ZnO double-layer piezoelectric layer based SMR (solidly mounted resonator) was designed and fabricated, in which the nano AlN film acted as a buffer layer. For optimization of the piezoelectric layer, a series of SMRs were fabricated with different AlN layer thicknesses from 15 nm to 100 nm by radio-frequency magnetr...
Article
Fabricating sensor devices directly on metallic component requires the use of an electrical insulating ceramic layer between the sensor and the metal. However, most ceramics lose their electrical insulation with the increasing temperature. In this paper, electrical insulation properties of ceramic thin film were extensively analyzed in high tempera...
Article
Full-text available
The platinum–platinum rhodium thin film thermocouples (TFTCs) were fabricated on the alumina substrate by the micromachining technology, which could operate at the temperature up to 1300°C. The thermoelectric output voltage was measured in the temperature range of 50–1300°C. The maximum thermoelectric voltage of the TFTC was 14.8 mV at 1300°C, whic...

Citations

... Thin film thermocouples (TFTC) on the other hand can be directly fabricated on to the surface of a turbine blade or NGV, greatly improving long term durability in comparison to conventional thermocouples. COMSOL simulations carried out by Duan et al. [38] show a ∼170 • C difference between conventional thermocouples and their thinfilm counterparts due to the distance between the thermocouple joint and the blade surface. The placement of a conventional thermocouple in its insulation filling adds an additional uncertainty of around 500 × 500 µm, which has a temperature difference from top to bottom of ∼300 • C. The uncertainty associated with the use of conventional thermocouples shows the motivation for the development of thin film equivalents. ...
... As one of the key components of airplanes and automotives, engines contain numerous rotating parts, including blades, bearing brackets, and shafts, which work in harsh environments, such as high rotational speeds and high temperatures [1][2][3][4][5]. Therefore, monitoring rotational speed and temperature parameters is vital for the safe and reliable operation of an engine. ...
... Zinc oxide is a wide-bandgap compound semiconductor material with excellent photoelectric properties [1][2][3]. As a new type of wide-bandgap semiconductor, ZnO has attracted increasing attention in recent years [4][5][6]. ...
... Duan et al. [74] have found that the electrically conductive nature of TBCs at elevated temperatures (above 600 • C) can be utilised as a form of smart sensor, by measuring a change in resistance with temperature. Experimental data shows good repeatability up to 950 • C, measurement error of less than 3%, fast response time (∼1s), and stability comparable to conventional thermocouples and TFTCs. ...
... The target-substrate spacing was about 70 mm. This high vacuum chamber and related Mg x Zn 1−x O film recipes were optimized in another our research article [24]. The vacuum chamber was pumped down to a base pressure of 3 × 10 -4 Pa for film deposition. ...
... A thermocouple can be embedded into the TBC on the surface of an NGV in this way and has been shown to perform well up to 450 • C [42]. The addition of Al 2 O 3 to YSZ(yttria-stabilized zirconia)-based TBCs improves their electrical insulation above 400 • C which allows TFTCs to be used effectively [43]. A summary of THTC systems is given by Satish et al. [44] along with the implementation of a K-type TFTC on an NGV deposited using an E-beam evaporation technique. ...
... With the advancements in artificial intelligence, development of intelligent propulsion systems is a widely studied research area. Duan et al. [10] proposed a smart and economical method for measuring the temperature of an aero-engine component using the thermal resistance on the turbine blade surfaces which has thermal barrier coating made up of YSZ material. It is used as a thermal sensor for intelligent monitoring the surface temperature. ...
... A summary of THTC systems is given by Satish et al. [44] along with the implementation of a K-type TFTC on an NGV deposited using an E-beam evaporation technique. Two methods of measuring temperature distribution on a TBC coating are given by Z. Ji et al. [45] whereby Pt soldering dots are placed along a PtRH thin film. Measurements are possible up to 1200 • C with this method. ...
... Recent years, thin film and bulk semiconductor thermocouples are widely investigated and applied in many advanced fields because of lack of vibration, energy efficiency, temperature range that has wide applications and high sensitivity value. 107,187,[190][191][192][193][194][195][196][197] So far, the cooling devices TE 107,198 have been examined and used in systems microclimate cooling that have been developed for military missions, medical devices, refrigerators powered by solar cells, interior air coolers and temperature controllers for microelectronic devices. 107 ...
... They are able to convert electrical energy into mechanical waves on the basis of the inverse piezoelectric effect. Basically, SAW devices are realized using an interdigital transducer (IDT) on a piezoelectric crystal substrate, such as quartz or lithium niobate (LiNbO 3 ) [2]. When excited by an AC voltage coming from an external voltage source or RF signal, the IDT provides, as a consequence of the inverse piezoelectric effect, the electric field necessary to displace the substrate and thus to form an acoustic wave on the piezoelectric crystal substrate. ...